Clank clank clankity-clank! Clank.
Balnaba --
Control System --
Death Machine --
Defense System --
Eyes --
Fused Mechanism --
Guardian --
Interception System --
Last Arm --
Lugeie --
Machine Cannon --
Searcher --
Soldier
Last Arm --
Fused Mechanism --
Resembles a shorter but sleeker version of the AT-STs from the Star Wars films, which were likely to have inspired it. As a side note, the death machine is the only Square-created Final Fantasy 1 monster to appear in Final Fantasy Legend on the GameBoy, which, despite its name (which was given to it for its American release), was originally a SaGa game, not Final Fantasy.
IMAGE: An AT-ST from Star Wars Episode VI: The Return of the Jedi
There's not much to say here - the names are self-explanatory, and I don't know if they were based on a robot from a film or something, or if they're original creations.
Back to...DEATH MACHINE

CONTROL SYSTEM, DEFENSE SYSTEM, EYES, FUSED MECHANISM, GUARDIAN, INTERCEPTION SYSTEM, LAST ARM, MACHINE CANNON, SEARCHER, SOLDIER

Note: there are a couple of other Final Fantasy enemies called soldier and guardian. I've given them seperate entries as they're not machines, meat person.
INDIVIDUAL ENTRIES
BY GAME
GROUPS